Shuya Takarae

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 8:45 AM - 12:00 PM Z24

Oral presentation
| CS Code-sharing session
| 【CS.5】 Code-sharing Session of 6.1 & 13.3 & 13.5

[10a-Z24-1~12] 【CS.5】 Code-sharing Session of 6.1 & 13.3 & 13.5

9:00 AM - 9:15 AM

[10a-Z24-2] Crystallization process of metastable Al-doped HfO₂ films
directly on Si by atomic layer depositio

〇Shuya Takarae¹, Daisuke Kiriya¹, Takeshi Yoshimura¹, Atushi Ashida¹, Norifumi Fujimura¹ (1.Osaka Pref. Univ.)