The 81st JSAP Autumn Meeting, 2020

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Oral presentation

CS Code-sharing session » 【CS.5】 Code-sharing Session of 6.1 & 13.3 & 13.5

[10a-Z24-1~12] 【CS.5】 Code-sharing Session of 6.1 & 13.3 & 13.5

Thu. Sep 10, 2020 8:45 AM - 12:00 PM Z24

Hironori Fujisawa(Univ. of Hyogo), Shosuke Fujii(Kioxia)

9:00 AM - 9:15 AM

[10a-Z24-2] Crystallization process of metastable Al-doped HfO2 films
directly on Si by atomic layer depositio

〇Shuya Takarae1, Daisuke Kiriya1, Takeshi Yoshimura1, Atushi Ashida1, Norifumi Fujimura1 (1.Osaka Pref. Univ.)

Keywords:HfO2, ALD, Crystal structure