Shunichi Yokoi

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 1:00 PM - 5:30 PM Z04

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[10p-Z04-1~17] 13.7 Compound and power electron devices and process technology

4:30 PM - 4:45 PM

[10p-Z04-14] Electrical properties of AlGaN/GaN MIS-HEMTs with SiO₂/Al₂O₃ double insulators fabricated by ALD Ⅱ

〇Shunichi Yokoi¹, Toshiharu Kubo¹, Takashi Egawa¹ (1.Nagoya Inst. of Tech)