Akira Uedono

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 1:00 PM - 5:30 PM Z04

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[10p-Z04-1~17] 13.7 Compound and power electron devices and process technology

4:45 PM - 5:00 PM

[10p-Z04-15] Open spaces in TEOS-SiO₂ film deposited on GaN probed by means of positron annihilation

〇Akira Uedono¹, Wataru Ueno¹, Takuji Hosoi², Werner Egger³, Christoph Hugenschmidt³, Marcel Dickmann⁴, Heiji Watanabe² (1.Univ. of Tsukuba, 2.Osaka Univ., 3.UniBwM, 4.TUM)