KyungPil NAM

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 1:00 PM - 5:30 PM Z04

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[10p-Z04-1~17] 13.7 Compound and power electron devices and process technology

5:15 PM - 5:30 PM

[10p-Z04-17] Characterization of MOS Capacitors Formed on Dry-etched GaN surfaces

〇(M2)KyungPil NAM¹, Takashi Ishida^1,2, Shinji Yamada^1,2,3, Matys Maciej², Tetsu Kachi², Jun Suda^1,2 (1.Nagoya Univ, 2.Nagoya Univ.IMaSS, 3.ULVAC ISET)

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