Yutaka Tokuda

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Speaker, Author, Co-Author

Fri. Sep 11, 2020 9:30 AM - 12:00 PM Z04

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[11a-Z04-1~9] 13.7 Compound and power electron devices and process technology

11:15 AM - 11:30 AM

[11a-Z04-7] Traps in MOVPE p-GaN produced by He ion implantation

〇Yutaka Tokuda¹, Hikaru Yoshida¹, Kazuyoshi Tomita², Tetsu Kachi², Joji Ito³, Takahide Yagi³ (1.Aichi Inst. Technol., 2.Nagoya University, 3.SHI-ATEX Co., Ltd)

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