Qimin Jin

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Speaker, Author, Co-Author

Fri. Sep 11, 2020 9:00 AM - 11:30 AM Z23

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[11a-Z23-1~9] 15.6 Group IV Compound Semiconductors (SiC)

9:45 AM - 10:00 AM

△ [11a-Z23-4] Characterization of lateral spread of implanted ions in a SiC substrate by scanning electron microscopy and scanning capacitance microscopy

〇Qimin Jin¹, Masashi Nakajima¹, Mitsuaki Kaneko¹, Tsunenobu Kimoto¹ (1.Kyoto Univ.)