Naoya Nakahara

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Speaker, Author, Co-Author

Fri. Sep 11, 2020 1:30 PM - 4:15 PM Z03

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[11p-Z03-3~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

3:30 PM - 3:45 PM

△ [11p-Z03-10] Change in charge density at the bottom of capillary plate in a pulse modulated CCP

〇Naoya Nakahara¹, Makoto Moriyama¹, Haruka Suzuki^1,2, Hirotaka Toyoda^1,2,3 (1.Nagoya Univ., 2.cLPS, 3.NIFS)