Shota Nunomura

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Speaker, Author, Co-Author

Fri. Sep 11, 2020 1:30 PM - 4:15 PM Z03

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[11p-Z03-3~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

1:30 PM - 1:45 PM

[11p-Z03-3] Generation and annihilation of plasma-induced defects ~effects on c-Si surface passivation~

〇Shota Nunomura¹, Isao Sakata¹, Hajime Sakakita¹, Kazunori Koga^2,3, Masaharu Shiratani² (1.AIST RIAEP, 2.Kyushu Univ, 3.NINS)