Kosuke Ota

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Speaker, Author, Co-Author

Tue. Sep 8, 2020 1:00 PM - 7:00 PM Z05

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[8p-Z05-1~20] 6.2 Carbon-based thin films

1:00 PM - 1:15 PM

△ [8p-Z05-1] Achievement of High Current Density (~20 kA/cm²) and Low On-Resistance (2.5mΩ·cm²) in Vertical-Type 2DHG Diamond MOSFET by Trench Gate Structure

〇(B)Kosuke Ota¹, Jun Tsunoda¹, Masayuki Iwataki¹, Kiyotaka Horikawa¹, Syotaro Amano¹, Naoya Niikura¹, Atsushi Hiraiwa¹, Hiroshi Kawarada^1,2 (1.Waseda Univ., 2.Kagami Inst.)