The 81st JSAP Autumn Meeting, 2020

Takayuki Ohta

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Chairperson, etc.

Thu. Sep 10, 2020 9:00 AM - 11:00 AM Z03

  • Oral presentation
  • | 8 Plasma Electronics
  • | 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[10a-Z03-1~8] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Takayuki Ohta(Meijo Univ.)