[10a-Z03-1~8] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[10a-Z03-5] Nitriding of steel surface by dielectric barrier discharge atmospheric pressure plasma

〇Hiroshi Okawa¹, Shiki Sato¹, Tetsuya Akitsu^2,1 (1.HSU, 2.Yamanashi Univ.)

Keywords:atmospheric pressure plasma, Nitriding

We have been developed the dielectric barrier discharge at atmospheric pressure, which does not need vacuum equipment. This device performs nitriding treatment in atmospheric pressure plasma generated by dielectric barrier discharge. The base gas is helium mixed nitrogen. The power supply frequency is 13.56MHz. A SUS430 plate, 15 mm square is placed in the plasma region. The plate is heated to about 700°C placed on a ceramic heater. After 2 hours treatment, the surface hardness of the sample increased to a maximum of HV860, although partially, from HV160 before the treatment.