The 81st JSAP Autumn Meeting, 2020

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21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[10a-Z20-1~12] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

Thu. Sep 10, 2020 9:00 AM - 12:15 PM Z20

Yutaka Furubayashi(Kochi Univ. of Tech.), Hiroyuki Nishinaka(Kyoto Inst. of Tech.)

9:30 AM - 9:45 AM

[10a-Z20-3] Epitaxial growth and optical characterization of flexible ZnO thin films using mist chemical vapor deposition

〇Yuta Arata1, Hiroyuki Nishinaka1, Masahiro Yoshimoto1 (1.Kyoto Inst. of Tech)

Keywords:zinc oxide, flexible, mist chemical vapor deposition