[10p-Z15-1~10] Recent progress in Advanced Ion Microscopy: Application to nano materials / devices and life science

▲ [10p-Z15-10] Evaluation method of vibration spectra of nanomechanical resonators using Helium Ion Microscope

〇Masaki Saito¹, Shinichi Ogawa^2,3, Yukinori Morita^2,3, Shin'ichi Warisawa^1,3, Reo Kometani^1,3 (1.Univ. of Tokyo, 2.AIST, 3.Operando-OIL)

Keywords:HIM, Helium ion microscope, resonator

A nanomechanical resonator is an important component of nanoelectromechanical systems (NEMS). Characterization of the resonator is needed for its further research. Frequency response is an important characteristic of the resonator and many methods to measure it quantitatively have been studied. Now, Helium ion microscope (HIM) has attracted much attention as a high spatial resolution technology. HIM has various advantages such as surface sensitivity, and it is expected to lead to more advanced evaluation of nanomechanical resonators. In this study, we attempted to observe the vibrational state and identify the resonant frequency of a resonator by measuring its vibration spectrum using HIM.