Fabrication of electric conductive SiC thin films for electrode application

Presentation information

Oral presentation

15 Crystal Engineering » 15.6 Group IV Compound Semiconductors (SiC)

Thu. Sep 10, 2020 1:15 PM - 6:00 PM Z23

Sakiko Kawanishi(Tohoku Univ.), Munetaka Noguchi(Mitsubishi Electric), Takeshi Tawara(富士電機)

2:00 PM - 2:15 PM

〇Takashi Koide¹, Young Jin², Shigeo Yasuhara², Wakana Takeuchi¹ (1.Aich Inst. of Tech., 2.Japan Advanced Chemicals Ltd.)

Keywords:SiC, Vinyl silane, P doping