[11p-Z23-1~20] 16.3 Bulk, thin-film and other silicon-based solar cells

△ [11p-Z23-6] Inkjet Printing of Liquid Silicon

〇(M2)Maui Nakayama¹, Takashi Masuda¹, Kimihiko Saito², Hirotaka Katayama³, Akira Terakawa³ (1.JAIST, 2.Fukusima Univ., 3.Panasonic)

Keywords:liquid silicon, semiconductor, inkjet printing

In this study, a polysilane precursor solution for the formation of semiconducting Si called liquid Si (liq-Si) is synthesized, and semiconducting Si is inkjet-printed. Inkjet printing of liq-Si provides a well-defined Si pattern without using traditional photolithography processes, thus providing a possibility for realizing printed Si electronics.