The 81st JSAP Autumn Meeting, 2020

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

[9a-Z05-1~8] 6.4 Thin films and New materials

Wed. Sep 9, 2020 9:15 AM - 11:15 AM Z05

Kohei Fujiwara(Tohoku Univ.), Motofumi Suzuki(Kyoto Univ)

9:15 AM - 9:30 AM

[9a-Z05-1] Controlling Dark Current of NdF3 Thin Films by Vacuum Annealing for Fabricating High Sensitivity Vacuum Ultraviolet Detector

Yusuke Horiuchi1, Seiya Kato1, Tomoki Kato1, Masahiko Kase2, Shingo Ono1 (1.Nagoya Tech, 2.USHIO INC)

Keywords:thin film, pulsed laser deposition, fluoride

NdF3 thin films were prepared by the pulsed laser deposition method, and the control of the dark current of NdF3 thin films in a photoconductive detector by vacuum annealing process was evaluated. We conducted experiments on the effects of annealing temperature and effects of annealing time. I present changes in dark current and the compositional changes of thin films due to annealing.