[9a-Z05-1~8] 6.4 Thin films and New materials

[9a-Z05-6] Relationship between lattice strain and lamella period in spinodally decomposed TiO₂-VO₂ films

〇Yuji Muraoka¹, Takahiro Fukuda², Takanori Wakita¹, Takayoshi Yokoya¹, Yoshito Takemoto² (1.Okayama Univ. RIIS, 2.Okayama Univ.)

Keywords:Spinodal decomposition, Lattice strain, Lamellar period

Relationship between lattice strain in the c-axis direction and lamellar period was investigated in the spinodally decomposed TiO₂-VO₂ films. In this study, Ti_0.2V_0.8O₂ solid solution (TVO) film was prepared on TiO₂(100) substrate using a pulsed laser deposition (PLD) technique. The substrate temperature was 673 K and the oxygen partial pressure was 1 Pa. The prepared film thickness is 20-150 nm. The residual strain in the c-axis length of the film was 0.1% for films with a film thickness of 40 to 150 nm and increased when the film thickness was below 40 nm, and reached 0.2% for 20 nm. In the presentation, we will present the relationship between the residual strain in the c-axis length of TVO films and the lamella period by spinodal decomposition.