The 81st JSAP Autumn Meeting, 2020

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21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[9p-Z20-1~16] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

Wed. Sep 9, 2020 1:00 PM - 5:45 PM Z20

Toshiyuki Kawaharamura(Kochi Univ. of Tech.), Takeyoshi Onuma(Kogakuin Univ.), Kentaro Kaneko(Kyoto Univ.)

2:45 PM - 3:00 PM

[9p-Z20-6] Observation of Stacking Faults in HVPE β-Gallium Oxide Epilayers

〇Makoto Kasu1, Sayleap Sdoeung1, Kohei Sasaki2, Satoshi Masuya2, Katsumi Kawasaki3, Jun Hirabayashi3, Akito Kuramata2 (1.Saga Univ., 2.Novel Crystal Technology, 3.TDK Corp.)

Keywords:gallium oxide, X-ray topography

We have found stacking faults in HVPE beta-gallium oxide.