Simulation verification of the inverse analysis by using 4D-XPS method to make reactions in the buried multi-layer stack-film interfaces visible

Satoshi Toyoda; Tomoki Yamamoto; Masashi Yoshimura; Hirosuke Sumida; Mineoi Susumu; Masatake Machida; Akitaka Yoshigoe; Satoru Suzuki; Kazushi Yokoyama; Yuji Ohashi; Shunsuke Kurosawa; Kei Kamada; Hiroki Sato; Akihiro Yamaji; Masao Yoshino; Takashi Hanada; Yuui Yokota; Akira Yoshikawa

Presentation information

Oral presentation

CS Code-sharing session » 【CS.7】 Code-sharing Session of 7.4 & 9.5

[9p-Z24-1~14] 【CS.7】 Code-sharing Session of 7.4 & 9.5

Wed. Sep 9, 2020 1:00 PM - 5:00 PM Z24

Nobuyuki Iwata(Nihon Univ.), Masaki Hada(Tukuba Univ.), Rikizo Yano(Nagoya Univ.)

3:00 PM - 3:15 PM

[9p-Z24-8] Simulation verification of the inverse analysis by using 4D-XPS method to make reactions in the buried multi-layer stack-film interfaces visible

〇Satoshi Toyoda¹, Tomoki Yamamoto², Masashi Yoshimura³, Hirosuke Sumida⁴, Mineoi Susumu⁴, Masatake Machida⁵, Akitaka Yoshigoe⁶, Satoru Suzuki², Kazushi Yokoyama², Yuji Ohashi¹, Shunsuke Kurosawa¹, Kei Kamada¹, Hiroki Sato¹, Akihiro Yamaji¹, Masao Yoshino⁷, Takashi Hanada⁷, Yuui Yokota⁷, Akira Yoshikawa⁷ (1.NICHe Tohoku Univ., 2.Univ. of Hyogo, 3.SPring-8 Service, 4.Mazda, 5.Scienta Omicron, 6.JAEA, 7.IMR Tohoku Univ.)

Keywords:XPS