[9p-Z29-1~17] 17.2 Graphene

[9p-Z29-9] A light emitter based on polycrystalline graphene patterned directly on silicon substrates from a solid-state carbon source

〇Kenta Nakagawa^1,2, Hidenori Takahashi², Yui Shimura², Hideyuki Maki^2,3 (1.KISTEC, 2.Keio Univ., 3.CSRN, Keio Univ.)

Keywords:graphene, light emitter, rapid thermal annealing

We developed a procedure for direct patterning of graphene with arbitrary position, size, and shape on silicon substrates from a solid-state carbon source without dry etching processing. Our light emitting graphene devices perform on a par with those based on high crystallinity graphene obtained via mechanical exfoliation or chemical vapor deposition.