Schin-ichi Takagi

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Speaker, Author, Co-Author

Fri. Mar 13, 2020 1:45 PM - 5:45 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[13p-A305-1~13] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

4:30 PM - 4:45 PM

[13p-A305-9] Compressive strain (110) SiGe-OI pMOSFET fabricated by Ge condensation

Kwangwon Jo¹, Kasidit Toprasertpong¹, Mitsuru Takenaka¹, 〇Schin-ichi Takagi¹ (1.Univ. Tokyo)

4:45 PM - 5:00 PM

[13p-A305-10] Tensile strain GOI nMOSFET on GOI substrates fabricated by Ge condensation

Kwangwon Jo¹, Cheol-Min Lim¹, Kasidit Toprasertpong¹, Mitsuru Takenaka¹, 〇Schin-ichi Takagi¹ (1.Univ. Tokyo)

5:00 PM - 5:15 PM

[13p-A305-11] Study on physical origin of electron mobility enhancement of (001) GOI nMOSFET with thinning GOI thickness

〇Schin-ichi Takagi¹, Kwangwon John¹, Cheol-Min Lim¹, Kasidit Toprasertpong¹, Mitsuru Takenaka¹ (1.Univ. Tokyo)