Tomoki Hirano

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Speaker, Author, Co-Author

Thu. Mar 12, 2020 10:00 AM - 11:45 AM A202 (6-202)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[12a-A202-1~7] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

10:15 AM - 10:30 AM

[12a-A202-2] Mechanism of WET chemical atomic layer etching on Ⅲ-Ⅴ compound semiconductor

〇Tomoki Hirano¹, Kenya Nishio¹, Takashi Fukatani¹, Suguru Saito¹, Yoshiya Hagimoto¹, Hayato Iwamoto¹ (1.Sony Semiconductor Solutions)