Shinji Kimura

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Speaker, Author, Co-Author

Thu. Mar 12, 2020 10:00 AM - 11:45 AM A202 (6-202)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[12a-A202-1~7] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

10:45 AM - 11:00 AM

[12a-A202-4] Dependence of Underlayer Surface Condition on Incubation Cycles in Si Nitride Film Growth using Atomic Layer Deposition Method

〇Shinji Kimura¹, Tadashi Yamaguchi¹, Masao Inoue¹ (1.Renesas)