Shota Nunomura

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Speaker, Author, Co-Author

Thu. Mar 12, 2020 1:45 PM - 6:00 PM A205 (6-205)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[12p-A205-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

5:30 PM - 5:45 PM

[12p-A205-14] Generation and annihilation of plasma-induced defects ~effects of Ar ion irradiation~

〇Shota Nunomura¹, Kazuya Nakane², Takayoshi Tsutsumi², Koji Matsubara¹, Masaru Hori² (1.AIST, 2.Nagoya Univ.)

5:45 PM - 6:00 PM

[12p-A205-15] Generation and annihilation of plasma-induced defects ~H in-diffusion and defects in c-Si~

〇Shota Nunomura¹, Isao Sakata¹, Koji Matsubara¹ (1.AIST RCPV)