Oral presentation
8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment
Thu. Mar 12, 2020 1:45 PM - 6:00 PM A205 (6-205)
Takayuki Ohta(Meijo Univ.), Masanaga Fukasawa(Sony Semiconductor Solutions), Taku Iwase(日立製作所)
△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above
1:45 PM - 2:00 PM
〇HU LI1, Denpoh Kazuki1 (1.TTS)
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2:00 PM - 2:15 PM
〇(M2)Shin Ogawa1, Akinori Oda1, Takayuki Ohta2, Hiroyuki Kousaka3 (1.Chiba Tech., 2.Meijo Univ., 3.Gifu Univ.)
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2:15 PM - 2:30 PM
〇Ayumi Ando1, Shota Uratani1, Keiko Nakamura1, Kazuhiro Uneyama1 (1.SAKURA COLOR PRODUCTS CORPORATION)
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2:30 PM - 2:45 PM
〇Yuji Ohkubo1, Tetsuya Nakagawa1, Katsuyoshi Endo1, Kazuya Yamamura1 (1.Osaka Univ.)
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2:45 PM - 3:00 PM
〇Yoshinori Oda1, Takayoshi Tsutsumi1, Kenji Ishikawa1, Masaru Hori1 (1.Nagoya Univ.)
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3:15 PM - 3:30 PM
〇Masahiro Hazumi1, Suganthamalar Selvaraj2, Hsiao Shih-Nan2, Sekine Makoto2, Hayashi Hisataka3,2, Sasaki Toshiyuki3, Abe Chihiro3, Tsutsumi Takayoshi2, Ishikawa Kenji2, Hori Masaru2 (1.Nagoya Univ., 2.cLPS, Nagoya Univ, 3.KIOXIA Corp)
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3:30 PM - 3:45 PM
〇Naoya Nakahara1, Makoto Moriyama1, Akihiro Mitsuya1, Haruka Suzuki1, Hirotaka Toyoda1 (1.Nagoya Univ.)
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3:45 PM - 4:00 PM
〇(D)Makoto Moriyama1, Naoya Nakahara1, Akihiro Mitsuya1, Haruka Suzuki1, Hirotaka Toyada1 (1.Nagoya Univ.)
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4:00 PM - 4:15 PM
〇Satoshi Tanida1, Daiki Iino1, Shuichi Kuboi1, Kazuaki Kurihara1, Hiroyuki Fukumizu1 (1.Kioxia)
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4:15 PM - 4:30 PM
〇Toshio Hayashi1, Makoto Sekine1, Kenji Ishikawa1, Masaru Hori1 (1.Nagoya University)
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4:45 PM - 5:00 PM
〇Kazuhiro Karahashi1, Tomoko Ito1, Satoshi Hamaguchi1 (1.Osaka Univ.)
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5:00 PM - 5:15 PM
〇(M1)Hojun Kang1, Tomoko Ito1, Junghwan Um2, Hikaru Kokura2, Taekyun Kang2, Sungil Cho2, Hyunjung Park2, Kazuhiro Karahashi1, Satoshi Hamaguchi1 (1.Osaka Univ., 2.Samsung Electronics)
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5:15 PM - 5:30 PM
〇Takashi Hamano1, Keiichiro Urabe1, Koji Eriguchi1 (1.Kyoto Univ.)
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5:30 PM - 5:45 PM
〇Shota Nunomura1, Kazuya Nakane2, Takayoshi Tsutsumi2, Koji Matsubara1, Masaru Hori2 (1.AIST, 2.Nagoya Univ.)
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5:45 PM - 6:00 PM
〇Shota Nunomura1, Isao Sakata1, Koji Matsubara1 (1.AIST RCPV)
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