Naoya Nakahara

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Speaker, Author, Co-Author

Thu. Mar 12, 2020 1:45 PM - 6:00 PM A205 (6-205)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[12p-A205-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

3:30 PM - 3:45 PM

△ [12p-A205-7] Estimation of voltage at the top of capillary plate in a CCP

〇Naoya Nakahara¹, Makoto Moriyama¹, Akihiro Mitsuya¹, Haruka Suzuki¹, Hirotaka Toyoda¹ (1.Nagoya Univ.)