Satoshi Tanida

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Speaker, Author, Co-Author

Thu. Mar 12, 2020 1:45 PM - 6:00 PM A205 (6-205)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[12p-A205-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

4:00 PM - 4:15 PM

[12p-A205-9] The effect of reactive fluorocarbon species on high aspect ratio etching

〇Satoshi Tanida¹, Daiki Iino¹, Shuichi Kuboi¹, Kazuaki Kurihara¹, Hiroyuki Fukumizu¹ (1.Kioxia)