Takashi Hamano

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Speaker, Author, Co-Author

Thu. Mar 12, 2020 1:45 PM - 6:00 PM A205 (6-205)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[12p-A205-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

5:15 PM - 5:30 PM

△ [12p-A205-13] Prediction Scheme for Long-Term Electrical Reliability of Plasma-Damaged SiO₂ Films Based on the Percolation Theory

〇Takashi Hamano¹, Keiichiro Urabe¹, Koji Eriguchi¹ (1.Kyoto Univ.)