Yuki Yoshiya

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Speaker, Author, Co-Author

Thu. Mar 12, 2020 1:15 PM - 5:30 PM B401 (2-401)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[12p-B401-1~16] 13.7 Compound and power electron devices and process technology

1:45 PM - 2:00 PM

△ [12p-B401-3] Evaluation of N-polar AlGaN/GaN heterostructure selectively etched under NH₃/H₂ mixed atmosphere

〇Yuki Yoshiya¹, Takuya Hoshi¹, Hiroki Sugiyama¹, Hideaki Matsuzaki¹ (1.NTT Device Technology Labs)