Takayuki Ohta

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Speaker, Author, Co-Author

Fri. Mar 13, 2020 9:00 AM - 10:30 AM A205 (6-205)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[13a-A205-1~6] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:15 AM - 9:30 AM

[13a-A205-2] Plasma diagnostics of carbon-HiPIMS for depositing DLC film

〇Takayuki Ohta¹, Jo Matsushima¹, Yuichi Murakami¹, Akinori Oda², Hiroyuki Kousaka³ (1.Meijo Univ., 2.Chiba Inst. Technol., 3.Gifu Univ.)