[13a-A205-1~6] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[13a-A205-2] Plasma diagnostics of carbon-HiPIMS for depositing DLC film

〇Takayuki Ohta¹, Jo Matsushima¹, Yuichi Murakami¹, Akinori Oda², Hiroyuki Kousaka³ (1.Meijo Univ., 2.Chiba Inst. Technol., 3.Gifu Univ.)

Keywords:diamond like carbon film, sputtering