Junichi Nomoto

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Speaker, Author, Co-Author

Fri. Mar 13, 2020 9:00 AM - 12:15 PM D419 (11-419)

Oral presentation
| Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[13a-D419-1~12] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

9:00 AM - 9:15 AM

[13a-D419-1] Influence of unintentionally incorporated Ar contents on the properties of magnetron-sputtered Al-doped ZnO polycrystalline films

〇Junichi Nomoto¹, Hisao Makino², Tetsuo Tsuchiya¹, Tetsuya Yamamoto² (1.Advanced Coating Technology Research Center, AIST, 2.Research Inst. Kochi Univ. Tech.)

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