Hiromasa Ohmi

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Speaker, Author, Co-Author

Fri. Mar 13, 2020 9:30 AM - 11:30 AM PA1 (PA)

Poster presentation
| 1 Interdisciplinary Physics and Related Areas of Science and Technology
| 1.3 Novel technologies and interdisciplinary engineering

[13a-PA1-1~17] 1.3 Novel technologies and interdisciplinary engineering

9:30 AM - 11:30 AM

[13a-PA1-13] Study on separation and concentration techniques for C₂F₄ gas synthesized by pure CF₄ plasma

〇Hiromasa Ohmi¹, Rei Tanaka¹, Hiromichi Nakatsuka¹, Daiki Iino², Kazuaki Kurihara², Hiroyuki Fukumizu², Jouta Fukuhara², Hisataka Hayashi², Hiroaki Kakiuchi¹, Kiyoshi Yasutake¹ (1.Osaka Univ., 2.Kioxia Corp.)