Daiki Tezuka

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Speaker, Author, Co-Author

Fri. Mar 13, 2020 9:30 AM - 11:30 AM PA2 (PA)

Poster presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[13a-PA2-1~10] 6.1 Ferroelectric thin films

9:30 AM - 11:30 AM

[13a-PA2-2] Fabrication and Characterization of High-k Gate Insulating Films by RF-Sputtering Method

〇Daiki Tezuka¹, Kenshin Narisawa¹, Kiyoshi Uchiyama¹ (1.National Institute of Technology, Tsuruoka College)