Hiroto Sakuba

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Speaker, Author, Co-Author

Fri. Mar 13, 2020 9:30 AM - 11:30 AM PA3 (PA)

Poster presentation
| 6 Thin Films and Surfaces
| 6.3 Oxide electronics

[13a-PA3-1~35] 6.3 Oxide electronics

9:30 AM - 11:30 AM

△ [13a-PA3-4] Improvement of ALD deposited Al₂O₃ film quality for application to diamond devices

〇Hiroto Sakuba¹, Mami Fujii¹, Yuma Karaki¹, Mutsunori Uenuma¹, Kiyoshi Takahashi², Yasuaki Ishikawa¹, Yukiharu Uraoka¹ (1.NAIST, 2.Nippon Aluminum Alkyls, Ltd)