Yoshitaka Nakano

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Speaker, Author, Co-Author

Fri. Mar 13, 2020 4:00 PM - 6:00 PM PA9 (PA)

Poster presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[13p-PA9-1~25] 13.7 Compound and power electron devices and process technology

4:00 PM - 6:00 PM

[13p-PA9-7] Study of Electrical Damage Introduced into p-Type GaN by CF₄ Plasma Treatments

〇Yoshitaka Nakano¹, Akira Toyotome¹, Masahito Niibe², Retsuo Kawakami³ (1.Chubu Univ., 2.Univ. Hyogo, 3.Tokushima Univ.)