Noriko Miura

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 9:00 AM - 12:00 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[14a-A305-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

11:30 AM - 11:45 AM

[14a-A305-10] Development of Minimal Ion Implantation Tool (II)

〇Noriko Miura¹, Naoki Hashimoto^1,2, Yoshitaka Kitamura^1,2, Fumito Imura^1,3, Kazushige Sato¹, Kazuhiro Koga¹, Yuuki Ishida^1,3, Toshiyuki Oodaira^1,3, Sommawan Khumpuang^1,3, Shiro Hara^1,3 (1.MINIMAL, 2.FUJI IMVAC INC., 3.AIST)

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