Toshikazu Yamada

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 9:00 AM - 12:00 PM B401 (2-401)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[14a-B401-1~11] 13.7 Compound and power electron devices and process technology

10:00 AM - 10:15 AM

[14a-B401-5] Mg recoil implantation into GaN with incident Nitrogen ion(5)

〇Toshikazu Yamada¹, Hisashi Yamada¹, Tokio Takahashi², Mituaki Shimizu¹ (1.AIST GaN-OIL, 2.AIST ESPRIT)