Yoshihiro Hirota

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 1:30 PM - 3:30 PM A401 (6-401)

Symposium (Oral)
| Symposium
| New functional memory devices with oxide materials and their physics

[14p-A401-1~4] New functional memory devices with oxide materials and their physics

1:30 PM - 2:00 PM

[14p-A401-1] DRAM Scaling Trend and Functional Oxide Process Technologies for Memory Devices

〇Yoshihiro Hirota¹ (1.Tokyo Electron Ltd.)