Takayuki Hagiwara

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 9:00 AM - 12:30 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[15a-A305-1~13] 13.3 Insulator technology

9:45 AM - 10:00 AM

[15a-A305-4] XPS analysis of a low-temperature ALD film by high purity ozone and ethylene with TMA

〇Takayuki Hagiwara¹, Ayaka Abe¹, Naoto Kameda¹, Toshinori Miura¹, Yoshiki Morikawa¹, Mitsuru Kekura¹, Ken Nakamura², Hidehiko Nonaka² (1.Meidensha Corp., 2.AIST)

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