HuaHsuan Chen

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 9:00 AM - 12:30 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[15a-A305-1~13] 13.3 Insulator technology

10:00 AM - 10:15 AM

▼ [15a-A305-5] Low Temperature Neutral Beam Enhanced Atomic Layer Deposition
of Silicon Nitride

〇HuaHsuan Chen¹, Beibei Ge¹, Daisuke Ohori¹, Tomohiro Kubota², Dai Ishikawa², Seiji Samukawa³ (1.IFS, Tohoku Univ., 2.ASM Japan K.K., 3.AIMR, Tohoku Univ.)