Kota Yamazaki

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 9:00 AM - 11:45 AM A404 (6-404)

Oral presentation
| 17 Nanocarbon Technology
| 17.3 Layered materials

[15a-A404-1~11] 17.3 Layered materials

11:00 AM - 11:15 AM

[15a-A404-9] Deposition of ZrS₂ by MOCVD using Zr[N(C₂H₅)CH₃]₄ and [(t-C₄H₉)₂S₂] as precursors

〇Kota Yamazaki¹, Yusuke Hibino^1,4, Yuya Oyanagi¹, Yusuke Hashimoto¹, Naomi Sawamoto¹, Hideaki Machida³, Masato Ishikawa³, Hiroshi Sudo³, Hitoshi Wakabayashi², Atushi Ogura¹ (1.Meiji Univ., 2.Tokyo Tech., 3.Gas-phase Growth Ltd., 4.JSPS Research Fellow)