Yoshiaki Watanabe

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 9:30 AM - 11:30 AM PB2 (PB)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics(Poster)

[15a-PB2-1~22] 8 Plasma Electronics

9:30 AM - 11:30 AM

[15a-PB2-11] Mass Spectrometric Study on Incident Radicals onto Electrode in Low-Pressure RF Tetramethylsilane Plasmas with Different Dilution Gases

〇Yoshiaki Watanabe¹, Syun Suzuki², Kouichi Ishii², Akinori Oda², Takayuki Ohta³, Hiroyuki Kousaka⁴ (1.Innovation Science, 2.Chiba IT., 3.Meijo Univ., 4.Gifu Univ.)

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