Takayuki Kurashige

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 1:45 PM - 4:30 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15p-A305-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

3:45 PM - 4:00 PM

△ [15p-A305-7] Fabrication of poly-Si TFTs and CMOS inverter circuits by a laser doping method using coating films

〇(B)Takayuki Kurashige¹, Kaname Imokawa^1,2, Daisuke Nakamura¹, Taizoh Sadoh¹, Tetsuya Goto³, Hiroshi Ikenoue^1,2 (1.Kyushu Univ., 2.Dept. of Gigaphoton Next GLP, Kyushu Univ., 3.Tohoku Univ.)

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