The 67th JSAP Spring Meeting 2020

Marina Yamaguchi

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Chairperson, etc.

Thu. Mar 12, 2020 1:45 PM - 5:15 PM A305 (6-305)

  • Oral presentation
  • | 13 Semiconductors
  • | 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[12p-A305-1~13] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

Munehiro Tada(NEC), Marina Yamaguchi(Kioxia)