Symposium (Oral)
Symposium » Progresses and future on EUV and soft x-ray imaging techniques
Sat. Mar 14, 2020 1:30 PM - 5:20 PM D305 (11-305)
Tetsuo Harada(Univ. of Hyogo)
△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above
1:30 PM - 2:00 PM
〇Hiroki Suga1 (1.the Univ. of Tokyo)
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2:00 PM - 2:30 PM
〇Eiji Takahashi1 (1.RIKEN)
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2:30 PM - 3:00 PM
〇Eiji Hosono1 (1.AIST)
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3:00 PM - 3:30 PM
〇Masahiro Katoh1,2 (1.Hiroshima Univ., 2.Inst. Mol. Sci.)
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3:35 PM - 4:05 PM
〇Kiwamu Takehisa1, Tomohiro Suzuki1, Hiroki Miyai1, Haruhiko Kusunose1 (1.Lasertec Corporation)
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4:05 PM - 4:35 PM
〇Yuichi Yamasaki1 (1.NIMS)
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4:35 PM - 5:05 PM
〇Nobukazu Teranishi1,2, Tetsuo Harada1, Takeo Watanabe1, Quan Zhou3, Masatoshi Kimura3, Jan Bogaerts3, Xinyang Wang3 (1.LASTi, U. of Hyogo, 2.RIE, Shizuoka Univ., 3.Gpixel Inc.)
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5:05 PM - 5:20 PM
〇Mitsunori Toyoda1,2, Yukifumi Momono2, Toshiyuki Kakudate2, Jun Chen1 (1.Tokyo Polytechnic Univ., 2.IMRAM, Tohoku Univ.)
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