The 67th JSAP Spring Meeting 2020

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15 Crystal Engineering » 15.4 III-V-group nitride crystals

[12a-A302-1~12] 15.4 III-V-group nitride crystals

Thu. Mar 12, 2020 9:00 AM - 12:15 PM A302 (6-302)

Atsushi Kobayashi(Univ. of Tokyo), Tomoyuki Tanikawa(Osaka Univ.)

9:15 AM - 9:30 AM

[12a-A302-2] Improvement of surface flatness and crystallinity in N-polar AlN grown on vicinal sapphire substrate

〇Ryota Sakamoto1, Tatuya Isono1, Tadatoshi Ito1, Kazuya Ataka2, Yongzhao Yao3, Yukari Ishikawa3, Narihito Okada1, Kazuyuki Tadatomo1 (1.Yamaguchi University Graduate School, 2.Yamaguchi University, 3.Japan Fine Ceramics Center)

Keywords:AlN, Flatness, crystalline