The 67th JSAP Spring Meeting 2020

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Poster presentation

17 Nanocarbon Technology » 17 Nanocarbon Technology(Poster)

[12a-PA2-1~77] 17 Nanocarbon Technology

Thu. Mar 12, 2020 9:30 AM - 11:30 AM PA2 (PA)

9:30 AM - 11:30 AM

[12a-PA2-50] Sensor Device Fabrication Process with SiN Passivated Graphene

〇Masami Tanioku1, Takao Ono1,2, Yasushi Kanai1, Tomohiro Koyama1, Naruto Miyakawa3, Syota Ushiba3, Masahiko Kimura3, Koichi Inoue1, Daichi Chiba1, Kazuhiko Matsumoto1 (1.Osaka Univ. ISIR, 2.JST-PRESTO, 3.Murata Mfg.)

Keywords:graphene, Sensor