The 67th JSAP Spring Meeting 2020

Presentation information

Oral presentation

8 Plasma Electronics » 8.1 Plasma production and diagnostics

[12p-A302-1~18] 8.1 Plasma production and diagnostics

Thu. Mar 12, 2020 1:15 PM - 6:00 PM A302 (6-302)

Kentaro Tomita(Kyushu Univ.), Nakagawa Yusuke(首都大), Manabu Tanaka(Kyushu Univ.)

3:45 PM - 4:00 PM

[12p-A302-10] Large Area Annealing by Magnetic Field Scanning of Atmospheric Pressure Thermal Plasma Beam

Kazuki Segawa1, Hiroaki Hanafusa1, Yuri Mizukawa1, Seiichiro Higashi1 (1.Hiroshima Univ.)

Keywords:Thermal plasma, Rapid thermal annealing, Thin film transistor

低コストな半導体薄膜の急速熱処理技術として大気圧熱プラズマジェット(TPJ)の応用が期待されている。本研究では、プラズマ長が約250 mmの大気圧熱プラズマビーム(AP-TPB)を生成し、その噴出方向を外部磁場によってスキャンする大面積熱処理技術を開発した。

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